JPH0195241U - - Google Patents

Info

Publication number
JPH0195241U
JPH0195241U JP19206287U JP19206287U JPH0195241U JP H0195241 U JPH0195241 U JP H0195241U JP 19206287 U JP19206287 U JP 19206287U JP 19206287 U JP19206287 U JP 19206287U JP H0195241 U JPH0195241 U JP H0195241U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum chamber
linear motion
wall
moving part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19206287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19206287U priority Critical patent/JPH0195241U/ja
Publication of JPH0195241U publication Critical patent/JPH0195241U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
  • Sealing Devices (AREA)
JP19206287U 1987-12-18 1987-12-18 Pending JPH0195241U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19206287U JPH0195241U (enrdf_load_stackoverflow) 1987-12-18 1987-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19206287U JPH0195241U (enrdf_load_stackoverflow) 1987-12-18 1987-12-18

Publications (1)

Publication Number Publication Date
JPH0195241U true JPH0195241U (enrdf_load_stackoverflow) 1989-06-23

Family

ID=31482938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19206287U Pending JPH0195241U (enrdf_load_stackoverflow) 1987-12-18 1987-12-18

Country Status (1)

Country Link
JP (1) JPH0195241U (enrdf_load_stackoverflow)

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