JPH0194461U - - Google Patents

Info

Publication number
JPH0194461U
JPH0194461U JP19148987U JP19148987U JPH0194461U JP H0194461 U JPH0194461 U JP H0194461U JP 19148987 U JP19148987 U JP 19148987U JP 19148987 U JP19148987 U JP 19148987U JP H0194461 U JPH0194461 U JP H0194461U
Authority
JP
Japan
Prior art keywords
dielectric
reaction vessel
line
shape
coated line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19148987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543097Y2 (US06534493-20030318-C00166.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19148987U priority Critical patent/JPH0543097Y2/ja
Publication of JPH0194461U publication Critical patent/JPH0194461U/ja
Application granted granted Critical
Publication of JPH0543097Y2 publication Critical patent/JPH0543097Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP19148987U 1987-12-16 1987-12-16 Expired - Lifetime JPH0543097Y2 (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19148987U JPH0543097Y2 (US06534493-20030318-C00166.png) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19148987U JPH0543097Y2 (US06534493-20030318-C00166.png) 1987-12-16 1987-12-16

Publications (2)

Publication Number Publication Date
JPH0194461U true JPH0194461U (US06534493-20030318-C00166.png) 1989-06-21
JPH0543097Y2 JPH0543097Y2 (US06534493-20030318-C00166.png) 1993-10-29

Family

ID=31482396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19148987U Expired - Lifetime JPH0543097Y2 (US06534493-20030318-C00166.png) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0543097Y2 (US06534493-20030318-C00166.png)

Also Published As

Publication number Publication date
JPH0543097Y2 (US06534493-20030318-C00166.png) 1993-10-29

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