JPH0194451U - - Google Patents

Info

Publication number
JPH0194451U
JPH0194451U JP18989087U JP18989087U JPH0194451U JP H0194451 U JPH0194451 U JP H0194451U JP 18989087 U JP18989087 U JP 18989087U JP 18989087 U JP18989087 U JP 18989087U JP H0194451 U JPH0194451 U JP H0194451U
Authority
JP
Japan
Prior art keywords
crucible
lid
center
evaporation source
small hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18989087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18989087U priority Critical patent/JPH0194451U/ja
Publication of JPH0194451U publication Critical patent/JPH0194451U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18989087U 1987-12-16 1987-12-16 Pending JPH0194451U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18989087U JPH0194451U (enrdf_load_stackoverflow) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18989087U JPH0194451U (enrdf_load_stackoverflow) 1987-12-16 1987-12-16

Publications (1)

Publication Number Publication Date
JPH0194451U true JPH0194451U (enrdf_load_stackoverflow) 1989-06-21

Family

ID=31480898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18989087U Pending JPH0194451U (enrdf_load_stackoverflow) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0194451U (enrdf_load_stackoverflow)

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