JPH0193738U - - Google Patents

Info

Publication number
JPH0193738U
JPH0193738U JP18900587U JP18900587U JPH0193738U JP H0193738 U JPH0193738 U JP H0193738U JP 18900587 U JP18900587 U JP 18900587U JP 18900587 U JP18900587 U JP 18900587U JP H0193738 U JPH0193738 U JP H0193738U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
protrusion
hole
groove portion
wafer cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18900587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18900587U priority Critical patent/JPH0193738U/ja
Publication of JPH0193738U publication Critical patent/JPH0193738U/ja
Pending legal-status Critical Current

Links

JP18900587U 1987-12-11 1987-12-11 Pending JPH0193738U (US06262066-20010717-C00315.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18900587U JPH0193738U (US06262066-20010717-C00315.png) 1987-12-11 1987-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18900587U JPH0193738U (US06262066-20010717-C00315.png) 1987-12-11 1987-12-11

Publications (1)

Publication Number Publication Date
JPH0193738U true JPH0193738U (US06262066-20010717-C00315.png) 1989-06-20

Family

ID=31480064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18900587U Pending JPH0193738U (US06262066-20010717-C00315.png) 1987-12-11 1987-12-11

Country Status (1)

Country Link
JP (1) JPH0193738U (US06262066-20010717-C00315.png)

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