JPH0193728U - - Google Patents
Info
- Publication number
- JPH0193728U JPH0193728U JP19085987U JP19085987U JPH0193728U JP H0193728 U JPH0193728 U JP H0193728U JP 19085987 U JP19085987 U JP 19085987U JP 19085987 U JP19085987 U JP 19085987U JP H0193728 U JPH0193728 U JP H0193728U
- Authority
- JP
- Japan
- Prior art keywords
- blowout
- gas
- passage
- semiconductor substrate
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 6
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19085987U JPH0193728U (cs) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19085987U JPH0193728U (cs) | 1987-12-16 | 1987-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0193728U true JPH0193728U (cs) | 1989-06-20 |
Family
ID=31481798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19085987U Pending JPH0193728U (cs) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193728U (cs) |
-
1987
- 1987-12-16 JP JP19085987U patent/JPH0193728U/ja active Pending