JPH0193030A - Electron gun - Google Patents
Electron gunInfo
- Publication number
- JPH0193030A JPH0193030A JP25051487A JP25051487A JPH0193030A JP H0193030 A JPH0193030 A JP H0193030A JP 25051487 A JP25051487 A JP 25051487A JP 25051487 A JP25051487 A JP 25051487A JP H0193030 A JPH0193030 A JP H0193030A
- Authority
- JP
- Japan
- Prior art keywords
- metallized
- cathode
- electron gun
- anode
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 230000009191 jumping Effects 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 description 7
- 238000001465 metallisation Methods 0.000 description 5
- 238000002844 melting Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
Landscapes
- Microwave Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、直線ビームマイクロ波管等に使用される電子
銃の構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of an electron gun used in a straight beam microwave tube or the like.
直線ビームマイクロ波管は、主として電子ビームを発生
する電子銃部、マイクロ波と電子ビームを作用させる高
周波回路部、高周波回路部を通過した電子ビームを捕捉
するコレクタ部から構成される。A straight beam microwave tube mainly includes an electron gun section that generates an electron beam, a high frequency circuit section that causes the microwaves and the electron beam to interact, and a collector section that captures the electron beam that has passed through the high frequency circuit section.
第２図により、従来の電子銃の構造を説明する。第２図
において、電子を放出するカソード板１は、タンタル、
モリブデンなどの耐熱性の高融点金属で作られた支持体
２を介してウェネルト電極３に支持される。カソード板
１は、ヒータ導入棒６及び、ウェネルト電極３に接続さ
れたヒータ４により加熱され、陽極５に印加される電圧
により電子を放射し、電子ビームが形成される。この電
子ビームは、支持板７の孔を通過して高周波回路部（図
示せず）に導入される。The structure of a conventional electron gun will be explained with reference to FIG. In FIG. 2, the cathode plate 1 that emits electrons is made of tantalum,
It is supported by a Wehnelt electrode 3 via a support 2 made of a heat-resistant, high-melting point metal such as molybdenum. The cathode plate 1 is heated by a heater introduction rod 6 and a heater 4 connected to the Wehnelt electrode 3, and emits electrons by a voltage applied to the anode 5, thereby forming an electron beam. This electron beam passes through a hole in the support plate 7 and is introduced into a high frequency circuit section (not shown).
ヒータ・カソード間、カソード・陽極間、陽極・支持板
間は、接続導電部材８，９．１０を介し、それらとの端
部封止面にメタライズ加工を施したアルミナ等の絶縁体
１３，１５．２４を用いて絶縁封止される。ここで、接
続導電部材８と絶縁体２４との封止部で、絶縁体２４の
端部封止面２２のメタライズ加工は、封止面全面に施さ
れている。Between the heater and the cathode, between the cathode and the anode, and between the anode and the support plate, there are connected conductive members 8, 9, and 10, and insulators 13, 15 made of alumina or the like are metallized on the end sealing surfaces thereof. It is insulated and sealed using .24. Here, in the sealing portion between the connecting conductive member 8 and the insulator 24, the metallization process of the end sealing surface 22 of the insulator 24 is performed on the entire sealing surface.
上述した従来の電子銃は、絶縁体の対向する両極の端部
封止面全面にメタライズ加工が施されているため、絶縁
体の両極に高圧が印加された時、負極より電子が電界放
出されて、コロナ放電を起こすことがあった。このコロ
ナ放電により、絶縁体表面で沿面放電が起こり、電極間
の耐圧劣化を生ずるという欠点があった。In the conventional electron gun described above, metallization is applied to the entire sealing surface of the opposite ends of the insulator, so when high voltage is applied to both poles of the insulator, electrons are field-emitted from the negative electrode. This may cause corona discharge. This corona discharge causes a creeping discharge on the surface of the insulator, which has the disadvantage of causing deterioration in the withstand voltage between the electrodes.
本発明は、電子を放出するカソードと、放出電子をビー
ム状に形成するウェネルト電極と、放出電子量を調節す
る陽極と、真空封止を目的として少なくとも端部にメタ
ライズ加工を施した略円筒状の絶縁体とを有する電子銃
において、絶縁体のうち少なくとも一つの絶縁体の負極
側端部封止面の一部に、メタライズ加工を施さない部分
を設けてメタライズ面積を少な（しかつ電極間の絶縁距
離を長くしたことを特徴とする。The present invention includes a cathode that emits electrons, a Wehnelt electrode that forms the emitted electrons into a beam shape, an anode that adjusts the amount of emitted electrons, and a substantially cylindrical shape that is metallized at least at the end for the purpose of vacuum sealing. In an electron gun having an insulator of It is characterized by a longer insulation distance.
〔実施例〕
次に、本発明について図面を参照して説明す−る。第１
図は、本発明の一実施例の縦断面図である。電子を放出
するカソード板１は、タンタル、モリブデン等の耐熱性
の高融点金属からなる支持体２を介してウェネルト電極
３に支持される。カソード板１は、ヒータ導入棒６及び
ウェネルト電極３に接続されたヒータ４によって加熱さ
れ、陽極５に印加される電圧（数Ｋｖ〜百数十Ｋｖ）に
より電子を放射し、電子ビームが形成され、この電子ビ
ームは支持板７以降に接続される高周波回路部（図示せ
ず）に導入される。ヒータ・カソード間、カソード・陽
極間、陽極・支持板間は、接続導電部材８，９．１０を
介し、これらとの端部封止面に公知の高融点金属法によ
りメタライズ加工を施したアルミナ等の絶縁体１３，１
４．１５を用いて絶縁及び封止される。[Example] Next, the present invention will be explained with reference to the drawings. 1st
The figure is a longitudinal sectional view of one embodiment of the present invention. A cathode plate 1 that emits electrons is supported by a Wehnelt electrode 3 via a support 2 made of a heat-resistant, high-melting point metal such as tantalum or molybdenum. The cathode plate 1 is heated by a heater 4 connected to a heater introduction rod 6 and a Wehnelt electrode 3, and emits electrons by a voltage (several Kv to hundreds of Kv) applied to an anode 5 to form an electron beam. This electron beam is introduced into a high frequency circuit section (not shown) connected after the support plate 7. Between the heater and the cathode, between the cathode and the anode, and between the anode and the support plate, there are connected conductive members 8, 9 and 10, and the end sealing surfaces thereof are made of alumina metallized using a known high melting point metal method. etc. insulator 13,1
4.15 insulated and sealed.
このうち、絶縁体１４の負極側封止面は、メタライズ施
工部１１のように内周側から肉厚の半分の所までは、ア
ルミナのままでメタライズ施工されておらず、残りの部
分にのみメタライズ加工が施されている。この結果、メ
タライズ面積が減り電界により飛び出す電子も抑制され
、かつ電極間の絶縁距離も長くなりコロナ放電ひいては
沿面放電が起こることのない耐電圧特性に優れた電子銃
ｉ遺を得ることができた。Of these, the negative electrode side sealing surface of the insulator 14 is alumina from the inner circumferential side up to half the wall thickness, like the metallized part 11, and is not metalized, and only the remaining part is not metalized. Metalized. As a result, the metallized area is reduced, electrons flying out due to the electric field are suppressed, and the insulation distance between the electrodes is also increased, making it possible to obtain an electron gun with excellent withstand voltage characteristics that prevents corona discharge and creeping discharge. .
以上説明したように本発明は、電子銃を構成する絶縁体
の少なくとも負極側端部封止面の一部に、メタライズ加
工を施さない部分を設けたことにより、メタライズ面積
を小さくし、かつ絶縁距離を長くして電界より飛び出す
電子を抑制し、コロナ放電を防ぐことができる。これに
より、電極間の耐圧劣化をなくす効果がある。As explained above, the present invention provides a portion that is not subjected to metallization on at least a part of the negative electrode end sealing surface of the insulator constituting the electron gun, thereby reducing the metallization area and providing insulation. By increasing the distance, electrons flying out from the electric field can be suppressed and corona discharge can be prevented. This has the effect of eliminating deterioration in breakdown voltage between the electrodes.
第１図は本発明の一実施例である電子銃の縦断面図、第
２図は従来の電子銃の縦断面図である。
１・・・カソード板、２・・・支持体、３・・・ウェネ
ルト電極、４・・・ヒータ、５・・・陽極、６・・・ヒ
ータ導入棒、７・・・支持板、８，９．１０・・・接続
導電部材、１１．１２．２２・・・メタライズ施工部、
１３゜１４．１５．２４・・・絶縁体。FIG. 1 is a longitudinal sectional view of an electron gun according to an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a conventional electron gun. DESCRIPTION OF SYMBOLS 1... Cathode plate, 2... Support body, 3... Wehnelt electrode, 4... Heater, 5... Anode, 6... Heater introduction rod, 7... Support plate, 8, 9.10...Connection conductive member, 11.12.22...Metallization construction part,
13°14.15.24... Insulator.
Claims (1)
するウェネルト電極と、放出電子量を調節する陽極と、
真空封止を目的として少なくとも端部にメタライズ加工
を施した略円筒状の絶縁体とを有する電子銃において、
前記絶縁体のうち少なくとも一つの絶縁体の負極側端部
封止面の一部にメタライズ加工を施さない部分を設けた
ことを特徴とする電子銃。A cathode that emits electrons, a Wehnelt electrode that forms emitted electrons into a beam shape, and an anode that adjusts the amount of emitted electrons.
In an electron gun having a substantially cylindrical insulator whose end portion is metallized for the purpose of vacuum sealing,
An electron gun characterized in that a part of the negative electrode side end sealing surface of at least one of the insulators is provided with a part that is not metalized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25051487A JPH0193030A (en) | 1987-10-02 | 1987-10-02 | Electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25051487A JPH0193030A (en) | 1987-10-02 | 1987-10-02 | Electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0193030A true JPH0193030A (en) | 1989-04-12 |
Family
ID=17209023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25051487A Pending JPH0193030A (en) | 1987-10-02 | 1987-10-02 | Electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193030A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11916099B2 (en) | 2021-06-08 | 2024-02-27 | International Business Machines Corporation | Multilayer dielectric for metal-insulator-metal capacitor |
-
1987
- 1987-10-02 JP JP25051487A patent/JPH0193030A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11916099B2 (en) | 2021-06-08 | 2024-02-27 | International Business Machines Corporation | Multilayer dielectric for metal-insulator-metal capacitor |
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