JPH0192651U - - Google Patents

Info

Publication number
JPH0192651U
JPH0192651U JP18908587U JP18908587U JPH0192651U JP H0192651 U JPH0192651 U JP H0192651U JP 18908587 U JP18908587 U JP 18908587U JP 18908587 U JP18908587 U JP 18908587U JP H0192651 U JPH0192651 U JP H0192651U
Authority
JP
Japan
Prior art keywords
substrate
spinner chuck
resist material
irregularly shaped
spinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18908587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18908587U priority Critical patent/JPH0192651U/ja
Publication of JPH0192651U publication Critical patent/JPH0192651U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP18908587U 1987-12-11 1987-12-11 Pending JPH0192651U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18908587U JPH0192651U (enrdf_load_stackoverflow) 1987-12-11 1987-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18908587U JPH0192651U (enrdf_load_stackoverflow) 1987-12-11 1987-12-11

Publications (1)

Publication Number Publication Date
JPH0192651U true JPH0192651U (enrdf_load_stackoverflow) 1989-06-16

Family

ID=31480141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18908587U Pending JPH0192651U (enrdf_load_stackoverflow) 1987-12-11 1987-12-11

Country Status (1)

Country Link
JP (1) JPH0192651U (enrdf_load_stackoverflow)

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