JPH0191829U - - Google Patents
Info
- Publication number
- JPH0191829U JPH0191829U JP18647587U JP18647587U JPH0191829U JP H0191829 U JPH0191829 U JP H0191829U JP 18647587 U JP18647587 U JP 18647587U JP 18647587 U JP18647587 U JP 18647587U JP H0191829 U JPH0191829 U JP H0191829U
- Authority
- JP
- Japan
- Prior art keywords
- hepa
- clean booth
- fan
- utility
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000004080 punching Methods 0.000 description 2
Landscapes
- Ventilation (AREA)
- Air-Flow Control Members (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18647587U JPH0191829U (pt) | 1987-12-08 | 1987-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18647587U JPH0191829U (pt) | 1987-12-08 | 1987-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0191829U true JPH0191829U (pt) | 1989-06-16 |
Family
ID=31477701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18647587U Pending JPH0191829U (pt) | 1987-12-08 | 1987-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0191829U (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03264799A (ja) * | 1990-03-15 | 1991-11-26 | Taikisha Ltd | ファンフィルタユニット |
| JP2015166646A (ja) * | 2014-03-03 | 2015-09-24 | 三機工業株式会社 | 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム |
-
1987
- 1987-12-08 JP JP18647587U patent/JPH0191829U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03264799A (ja) * | 1990-03-15 | 1991-11-26 | Taikisha Ltd | ファンフィルタユニット |
| JP2015166646A (ja) * | 2014-03-03 | 2015-09-24 | 三機工業株式会社 | 排気の循環利用型安全キャビネット及び排気の循環利用型安全キャビネットを備えるクリーンルームの空気循環システム |