JPH0191096U - - Google Patents

Info

Publication number
JPH0191096U
JPH0191096U JP18541387U JP18541387U JPH0191096U JP H0191096 U JPH0191096 U JP H0191096U JP 18541387 U JP18541387 U JP 18541387U JP 18541387 U JP18541387 U JP 18541387U JP H0191096 U JPH0191096 U JP H0191096U
Authority
JP
Japan
Prior art keywords
circumferential surface
rotor
gap
stator
thread groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18541387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18541387U priority Critical patent/JPH0191096U/ja
Publication of JPH0191096U publication Critical patent/JPH0191096U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18541387U 1987-12-07 1987-12-07 Pending JPH0191096U (US06229276-20010508-P00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18541387U JPH0191096U (US06229276-20010508-P00081.png) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18541387U JPH0191096U (US06229276-20010508-P00081.png) 1987-12-07 1987-12-07

Publications (1)

Publication Number Publication Date
JPH0191096U true JPH0191096U (US06229276-20010508-P00081.png) 1989-06-15

Family

ID=31476731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18541387U Pending JPH0191096U (US06229276-20010508-P00081.png) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0191096U (US06229276-20010508-P00081.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012077411A1 (ja) * 2010-12-10 2012-06-14 エドワーズ株式会社 真空ポンプ
WO2012172851A1 (ja) * 2011-06-17 2012-12-20 エドワーズ株式会社 真空ポンプとそのロータ
EP2594803A1 (de) * 2011-11-16 2013-05-22 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
JP2013217226A (ja) * 2012-04-05 2013-10-24 Edwards Kk ロータ、真空ポンプ、及び、真空ポンプの組立方法
JP2017089582A (ja) * 2015-11-16 2017-05-25 エドワーズ株式会社 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5286576A (en) * 1976-01-14 1977-07-19 Hitachi Ltd Particle pump for gas centrifugation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5286576A (en) * 1976-01-14 1977-07-19 Hitachi Ltd Particle pump for gas centrifugation

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2650544A4 (en) * 2010-12-10 2018-04-11 Edwards Japan Limited Vacuum pump
WO2012077411A1 (ja) * 2010-12-10 2012-06-14 エドワーズ株式会社 真空ポンプ
JP5878876B2 (ja) * 2010-12-10 2016-03-08 エドワーズ株式会社 真空ポンプ
JPWO2012172851A1 (ja) * 2011-06-17 2015-02-23 エドワーズ株式会社 真空ポンプとそのロータ
WO2012172851A1 (ja) * 2011-06-17 2012-12-20 エドワーズ株式会社 真空ポンプとそのロータ
EP2722527A1 (en) * 2011-06-17 2014-04-23 Edwards Japan Limited Vacuum pump and rotor therefor
EP2722527A4 (en) * 2011-06-17 2014-12-17 Edwards Japan Ltd VACUUM PUMP AND ROTOR
JP2013104430A (ja) * 2011-11-16 2013-05-30 Pfeiffer Vacuum Gmbh 摩擦真空ポンプ
EP2594803A1 (de) * 2011-11-16 2013-05-22 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
JP2013217226A (ja) * 2012-04-05 2013-10-24 Edwards Kk ロータ、真空ポンプ、及び、真空ポンプの組立方法
JP2017089582A (ja) * 2015-11-16 2017-05-25 エドワーズ株式会社 真空ポンプ
WO2017086135A1 (ja) * 2015-11-16 2017-05-26 エドワーズ株式会社 真空ポンプ
US10907653B2 (en) 2015-11-16 2021-02-02 Edwards Japan Limited Vacuum pump

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