JPH0189929U - - Google Patents
Info
- Publication number
- JPH0189929U JPH0189929U JP18707187U JP18707187U JPH0189929U JP H0189929 U JPH0189929 U JP H0189929U JP 18707187 U JP18707187 U JP 18707187U JP 18707187 U JP18707187 U JP 18707187U JP H0189929 U JPH0189929 U JP H0189929U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- changeover switch
- drooping
- utility
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18707187U JPH0650507Y2 (ja) | 1987-12-07 | 1987-12-07 | 多結晶シリコン製造用電源装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18707187U JPH0650507Y2 (ja) | 1987-12-07 | 1987-12-07 | 多結晶シリコン製造用電源装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0189929U true JPH0189929U (en, 2012) | 1989-06-13 |
JPH0650507Y2 JPH0650507Y2 (ja) | 1994-12-21 |
Family
ID=31478256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18707187U Expired - Lifetime JPH0650507Y2 (ja) | 1987-12-07 | 1987-12-07 | 多結晶シリコン製造用電源装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0650507Y2 (en, 2012) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4681084B1 (ja) * | 2010-02-23 | 2011-05-11 | 株式会社テオス | Cvd処理方法およびその方法を使用するcvd装置 |
JP2011250680A (ja) * | 2010-05-21 | 2011-12-08 | Aeg Power Solutions Bv | 第1給電装置および第2給電装置を備えた給電システム |
-
1987
- 1987-12-07 JP JP18707187U patent/JPH0650507Y2/ja not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4681084B1 (ja) * | 2010-02-23 | 2011-05-11 | 株式会社テオス | Cvd処理方法およびその方法を使用するcvd装置 |
WO2011104740A1 (ja) * | 2010-02-23 | 2011-09-01 | 株式会社テオス | Cvd処理方法およびその方法を使用するcvd装置 |
KR101113013B1 (ko) * | 2010-02-23 | 2012-03-21 | 테오스 가부시키가이샤 | Cvd 처리 방법 및 그 방법을 사용하는 cvd 장치 |
JP2011250680A (ja) * | 2010-05-21 | 2011-12-08 | Aeg Power Solutions Bv | 第1給電装置および第2給電装置を備えた給電システム |
Also Published As
Publication number | Publication date |
---|---|
JPH0650507Y2 (ja) | 1994-12-21 |