JPH0189748U - - Google Patents

Info

Publication number
JPH0189748U
JPH0189748U JP18532187U JP18532187U JPH0189748U JP H0189748 U JPH0189748 U JP H0189748U JP 18532187 U JP18532187 U JP 18532187U JP 18532187 U JP18532187 U JP 18532187U JP H0189748 U JPH0189748 U JP H0189748U
Authority
JP
Japan
Prior art keywords
wafer
pusher
clamping plate
roller
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18532187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18532187U priority Critical patent/JPH0189748U/ja
Publication of JPH0189748U publication Critical patent/JPH0189748U/ja
Pending legal-status Critical Current

Links

JP18532187U 1987-12-07 1987-12-07 Pending JPH0189748U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18532187U JPH0189748U (US06826419-20041130-M00005.png) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18532187U JPH0189748U (US06826419-20041130-M00005.png) 1987-12-07 1987-12-07

Publications (1)

Publication Number Publication Date
JPH0189748U true JPH0189748U (US06826419-20041130-M00005.png) 1989-06-13

Family

ID=31476640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18532187U Pending JPH0189748U (US06826419-20041130-M00005.png) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0189748U (US06826419-20041130-M00005.png)

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