JPH0189739U - - Google Patents

Info

Publication number
JPH0189739U
JPH0189739U JP18508887U JP18508887U JPH0189739U JP H0189739 U JPH0189739 U JP H0189739U JP 18508887 U JP18508887 U JP 18508887U JP 18508887 U JP18508887 U JP 18508887U JP H0189739 U JPH0189739 U JP H0189739U
Authority
JP
Japan
Prior art keywords
pressurized oxidation
opening
gas
oxidation apparatus
pressure vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18508887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18508887U priority Critical patent/JPH0189739U/ja
Publication of JPH0189739U publication Critical patent/JPH0189739U/ja
Pending legal-status Critical Current

Links

JP18508887U 1987-12-04 1987-12-04 Pending JPH0189739U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18508887U JPH0189739U (enrdf_load_stackoverflow) 1987-12-04 1987-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18508887U JPH0189739U (enrdf_load_stackoverflow) 1987-12-04 1987-12-04

Publications (1)

Publication Number Publication Date
JPH0189739U true JPH0189739U (enrdf_load_stackoverflow) 1989-06-13

Family

ID=31476416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18508887U Pending JPH0189739U (enrdf_load_stackoverflow) 1987-12-04 1987-12-04

Country Status (1)

Country Link
JP (1) JPH0189739U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198717A (ja) * 1985-02-28 1986-09-03 Mitsubishi Electric Corp 化学的気相成長装置
JPS6224630A (ja) * 1985-07-24 1987-02-02 Mitsubishi Electric Corp 熱酸化膜形成方法及びその装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198717A (ja) * 1985-02-28 1986-09-03 Mitsubishi Electric Corp 化学的気相成長装置
JPS6224630A (ja) * 1985-07-24 1987-02-02 Mitsubishi Electric Corp 熱酸化膜形成方法及びその装置

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