JPH0189736U - - Google Patents

Info

Publication number
JPH0189736U
JPH0189736U JP18552687U JP18552687U JPH0189736U JP H0189736 U JPH0189736 U JP H0189736U JP 18552687 U JP18552687 U JP 18552687U JP 18552687 U JP18552687 U JP 18552687U JP H0189736 U JPH0189736 U JP H0189736U
Authority
JP
Japan
Prior art keywords
air
hot
hot air
semiconductor substrate
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18552687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18552687U priority Critical patent/JPH0189736U/ja
Publication of JPH0189736U publication Critical patent/JPH0189736U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP18552687U 1987-12-04 1987-12-04 Pending JPH0189736U (US06589383-20030708-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18552687U JPH0189736U (US06589383-20030708-C00041.png) 1987-12-04 1987-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18552687U JPH0189736U (US06589383-20030708-C00041.png) 1987-12-04 1987-12-04

Publications (1)

Publication Number Publication Date
JPH0189736U true JPH0189736U (US06589383-20030708-C00041.png) 1989-06-13

Family

ID=31476840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18552687U Pending JPH0189736U (US06589383-20030708-C00041.png) 1987-12-04 1987-12-04

Country Status (1)

Country Link
JP (1) JPH0189736U (US06589383-20030708-C00041.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012519978A (ja) * 2009-03-13 2012-08-30 エーエヌディ コーポレーション 高圧処理器を利用した基板処理装置及び高圧処理器のガスリサイクル方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012519978A (ja) * 2009-03-13 2012-08-30 エーエヌディ コーポレーション 高圧処理器を利用した基板処理装置及び高圧処理器のガスリサイクル方法

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