JPH0189731U - - Google Patents

Info

Publication number

JPH0189731U

JPH0189731U JP18508687U JP18508687U JPH0189731U JP H0189731 U JPH0189731 U JP H0189731U JP 18508687 U JP18508687 U JP 18508687U JP 18508687 U JP18508687 U JP 18508687U JP H0189731 U JPH0189731 U JP H0189731U

Authority

JP

Japan

Prior art keywords

transfer device

wafer boat

boat transfer

hawk

heating tube

Prior art date

1987-12-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 5
• 238000010586 diagram Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1