JPH0189449U - - Google Patents

Info

Publication number
JPH0189449U
JPH0189449U JP18536987U JP18536987U JPH0189449U JP H0189449 U JPH0189449 U JP H0189449U JP 18536987 U JP18536987 U JP 18536987U JP 18536987 U JP18536987 U JP 18536987U JP H0189449 U JPH0189449 U JP H0189449U
Authority
JP
Japan
Prior art keywords
magnetic shield
spacer
ion source
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main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18536987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18536987U priority Critical patent/JPH0189449U/ja
Publication of JPH0189449U publication Critical patent/JPH0189449U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP18536987U 1987-12-07 1987-12-07 Pending JPH0189449U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18536987U JPH0189449U (US06826419-20041130-M00005.png) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18536987U JPH0189449U (US06826419-20041130-M00005.png) 1987-12-07 1987-12-07

Publications (1)

Publication Number Publication Date
JPH0189449U true JPH0189449U (US06826419-20041130-M00005.png) 1989-06-13

Family

ID=31476688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18536987U Pending JPH0189449U (US06826419-20041130-M00005.png) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0189449U (US06826419-20041130-M00005.png)

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