JPH0189398U - - Google Patents
Info
- Publication number
- JPH0189398U JPH0189398U JP1987184051U JP18405187U JPH0189398U JP H0189398 U JPH0189398 U JP H0189398U JP 1987184051 U JP1987184051 U JP 1987184051U JP 18405187 U JP18405187 U JP 18405187U JP H0189398 U JPH0189398 U JP H0189398U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- vibration
- movement
- laminated piezoelectric
- contract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Description
第１図は本考案の第１実施例の構成を示す平面
図、第２図は本考案の第２実施例の構成を示す平
面図である。第３図および第４図ａ，ｂは上記各
実施例の基本的作用を示すための図で、第３図は
ヒステリシスカーブを示す図、第４図ａ，ｂはア
クチエータ，の接合部の模式図と合成変位を
示す特性図である。第５図は従来の振動型微動ス
テージの構成を示す斜視図である。
２１，２２，４１，４２…固定台、２３，２４
…板バネ、２５〜２８，３１，３２…押え板、３
０…振動ステージ、３３，３４…積層型圧電アク
チエータ、３３ａ，３３ｂ，３４ａ，３４ｂ…リ
ード端子、ａ〜ｆ…ネジ穴、Ｍ，Ｎ，Ｖ，Ｗ…突
起部。
FIG. 1 is a plan view showing the structure of a first embodiment of the present invention, and FIG. 2 is a plan view showing the structure of a second embodiment of the present invention. Fig. 3 and Fig. 4 a, b are diagrams showing the basic operation of each of the above embodiments, Fig. 3 is a diagram showing a hysteresis curve, and Fig. 4 a, b is a schematic diagram of the joint part of the actuator. FIG. FIG. 5 is a perspective view showing the configuration of a conventional vibration type fine movement stage. 21, 22, 41, 42...Fixed stand, 23, 24
...Plate spring, 25-28, 31, 32...Press plate, 3
0... Vibration stage, 33, 34... Laminated piezoelectric actuator, 33a, 33b, 34a, 34b... Lead terminal, a to f... Screw hole, M, N, V, W... Projection.
Claims (1)
ピエゾステージにおいて、ステージ駆動用として
積層圧電アクチエータを一対用い、一方が伸張す
る場合に他方は縮小するように動作させて振動駆
動させることを特徴とする振動型微動ステージ。 A vibrating fine-movement piezo stage that uses parallel plate springs to make slight vibrations is characterized in that a pair of laminated piezoelectric actuators are used to drive the stage, and when one expands, the other is operated to contract, thereby driving the stage through vibration. Vibration type fine movement stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987184051U JPH0189398U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987184051U JPH0189398U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189398U true JPH0189398U (en) | 1989-06-13 |
Family
ID=31475439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987184051U Pending JPH0189398U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189398U (en) |
-
1987
- 1987-12-02 JP JP1987184051U patent/JPH0189398U/ja active Pending
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