JPH0188619U - - Google Patents
Info
- Publication number
- JPH0188619U JPH0188619U JP18298687U JP18298687U JPH0188619U JP H0188619 U JPH0188619 U JP H0188619U JP 18298687 U JP18298687 U JP 18298687U JP 18298687 U JP18298687 U JP 18298687U JP H0188619 U JPH0188619 U JP H0188619U
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- swing
- processing apparatus
- vacuum processing
- rotation range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
- Lift Valve (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18298687U JPH0188619U (enExample) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18298687U JPH0188619U (enExample) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188619U true JPH0188619U (enExample) | 1989-06-12 |
Family
ID=31474423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18298687U Pending JPH0188619U (enExample) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188619U (enExample) |
-
1987
- 1987-12-02 JP JP18298687U patent/JPH0188619U/ja active Pending