JPH0188619U - - Google Patents

Info

Publication number
JPH0188619U
JPH0188619U JP18298687U JP18298687U JPH0188619U JP H0188619 U JPH0188619 U JP H0188619U JP 18298687 U JP18298687 U JP 18298687U JP 18298687 U JP18298687 U JP 18298687U JP H0188619 U JPH0188619 U JP H0188619U
Authority
JP
Japan
Prior art keywords
gate valve
swing
processing apparatus
vacuum processing
rotation range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18298687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18298687U priority Critical patent/JPH0188619U/ja
Publication of JPH0188619U publication Critical patent/JPH0188619U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
  • Lift Valve (AREA)
JP18298687U 1987-12-02 1987-12-02 Pending JPH0188619U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18298687U JPH0188619U (enrdf_load_stackoverflow) 1987-12-02 1987-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18298687U JPH0188619U (enrdf_load_stackoverflow) 1987-12-02 1987-12-02

Publications (1)

Publication Number Publication Date
JPH0188619U true JPH0188619U (enrdf_load_stackoverflow) 1989-06-12

Family

ID=31474423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18298687U Pending JPH0188619U (enrdf_load_stackoverflow) 1987-12-02 1987-12-02

Country Status (1)

Country Link
JP (1) JPH0188619U (enrdf_load_stackoverflow)

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