JPH0188455U - - Google Patents
Info
- Publication number
- JPH0188455U JPH0188455U JP1987184028U JP18402887U JPH0188455U JP H0188455 U JPH0188455 U JP H0188455U JP 1987184028 U JP1987184028 U JP 1987184028U JP 18402887 U JP18402887 U JP 18402887U JP H0188455 U JPH0188455 U JP H0188455U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- excitation beam
- mapping
- analysis system
- drive mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 7
- 238000013507 mapping Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987184028U JPH0188455U (enExample) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987184028U JPH0188455U (enExample) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188455U true JPH0188455U (enExample) | 1989-06-12 |
Family
ID=31475418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987184028U Pending JPH0188455U (enExample) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188455U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5979945A (ja) * | 1982-10-29 | 1984-05-09 | Shimadzu Corp | 荷電粒子線走査型分析装置 |
-
1987
- 1987-12-01 JP JP1987184028U patent/JPH0188455U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5979945A (ja) * | 1982-10-29 | 1984-05-09 | Shimadzu Corp | 荷電粒子線走査型分析装置 |