JPH0187855U - - Google Patents
Info
- Publication number
- JPH0187855U JPH0187855U JP1987185221U JP18522187U JPH0187855U JP H0187855 U JPH0187855 U JP H0187855U JP 1987185221 U JP1987185221 U JP 1987185221U JP 18522187 U JP18522187 U JP 18522187U JP H0187855 U JPH0187855 U JP H0187855U
- Authority
- JP
- Japan
- Prior art keywords
- carrier plate
- circumferential side
- groove
- polishing
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012050 conventional carrier Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987185221U JPH0641798Y2 (ja) | 1987-12-04 | 1987-12-04 | 丸棒研磨用キャリアプレート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987185221U JPH0641798Y2 (ja) | 1987-12-04 | 1987-12-04 | 丸棒研磨用キャリアプレート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0187855U true JPH0187855U (me) | 1989-06-09 |
| JPH0641798Y2 JPH0641798Y2 (ja) | 1994-11-02 |
Family
ID=31476547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987185221U Expired - Lifetime JPH0641798Y2 (ja) | 1987-12-04 | 1987-12-04 | 丸棒研磨用キャリアプレート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641798Y2 (me) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209876A (ja) * | 1985-03-13 | 1986-09-18 | Toshiba Corp | ラツプ装置 |
| JPS62162463A (ja) * | 1986-01-10 | 1987-07-18 | Hitachi Ltd | 両面研磨装置 |
-
1987
- 1987-12-04 JP JP1987185221U patent/JPH0641798Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209876A (ja) * | 1985-03-13 | 1986-09-18 | Toshiba Corp | ラツプ装置 |
| JPS62162463A (ja) * | 1986-01-10 | 1987-07-18 | Hitachi Ltd | 両面研磨装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641798Y2 (ja) | 1994-11-02 |