JPH0187542U - - Google Patents

Info

Publication number
JPH0187542U
JPH0187542U JP18463287U JP18463287U JPH0187542U JP H0187542 U JPH0187542 U JP H0187542U JP 18463287 U JP18463287 U JP 18463287U JP 18463287 U JP18463287 U JP 18463287U JP H0187542 U JPH0187542 U JP H0187542U
Authority
JP
Japan
Prior art keywords
base
support groove
entrance
top plate
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18463287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18463287U priority Critical patent/JPH0187542U/ja
Publication of JPH0187542U publication Critical patent/JPH0187542U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP18463287U 1987-12-03 1987-12-03 Pending JPH0187542U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18463287U JPH0187542U (US20100268047A1-20101021-C00003.png) 1987-12-03 1987-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18463287U JPH0187542U (US20100268047A1-20101021-C00003.png) 1987-12-03 1987-12-03

Publications (1)

Publication Number Publication Date
JPH0187542U true JPH0187542U (US20100268047A1-20101021-C00003.png) 1989-06-09

Family

ID=31475978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18463287U Pending JPH0187542U (US20100268047A1-20101021-C00003.png) 1987-12-03 1987-12-03

Country Status (1)

Country Link
JP (1) JPH0187542U (US20100268047A1-20101021-C00003.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263442A (ja) * 1985-09-14 1987-03-20 Oki Electric Ind Co Ltd ウエハ移載装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263442A (ja) * 1985-09-14 1987-03-20 Oki Electric Ind Co Ltd ウエハ移載装置

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