JPH0187541U - - Google Patents
Info
- Publication number
- JPH0187541U JPH0187541U JP18321387U JP18321387U JPH0187541U JP H0187541 U JPH0187541 U JP H0187541U JP 18321387 U JP18321387 U JP 18321387U JP 18321387 U JP18321387 U JP 18321387U JP H0187541 U JPH0187541 U JP H0187541U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- guide plate
- holding groove
- holding
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 7
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18321387U JPH0187541U (cs) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18321387U JPH0187541U (cs) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187541U true JPH0187541U (cs) | 1989-06-09 |
Family
ID=31474644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18321387U Pending JPH0187541U (cs) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187541U (cs) |
-
1987
- 1987-12-01 JP JP18321387U patent/JPH0187541U/ja active Pending
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