JPH0187538U - - Google Patents

Info

Publication number
JPH0187538U
JPH0187538U JP18470287U JP18470287U JPH0187538U JP H0187538 U JPH0187538 U JP H0187538U JP 18470287 U JP18470287 U JP 18470287U JP 18470287 U JP18470287 U JP 18470287U JP H0187538 U JPH0187538 U JP H0187538U
Authority
JP
Japan
Prior art keywords
pattern
misalignment
linear side
patterns
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18470287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18470287U priority Critical patent/JPH0187538U/ja
Publication of JPH0187538U publication Critical patent/JPH0187538U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18470287U 1987-12-02 1987-12-02 Pending JPH0187538U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18470287U JPH0187538U (enrdf_load_stackoverflow) 1987-12-02 1987-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18470287U JPH0187538U (enrdf_load_stackoverflow) 1987-12-02 1987-12-02

Publications (1)

Publication Number Publication Date
JPH0187538U true JPH0187538U (enrdf_load_stackoverflow) 1989-06-09

Family

ID=31476043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18470287U Pending JPH0187538U (enrdf_load_stackoverflow) 1987-12-02 1987-12-02

Country Status (1)

Country Link
JP (1) JPH0187538U (enrdf_load_stackoverflow)

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