JPH0187531U - - Google Patents

Info

Publication number
JPH0187531U
JPH0187531U JP18398587U JP18398587U JPH0187531U JP H0187531 U JPH0187531 U JP H0187531U JP 18398587 U JP18398587 U JP 18398587U JP 18398587 U JP18398587 U JP 18398587U JP H0187531 U JPH0187531 U JP H0187531U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment apparatus
core tube
furnace core
wafer heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18398587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18398587U priority Critical patent/JPH0187531U/ja
Publication of JPH0187531U publication Critical patent/JPH0187531U/ja
Pending legal-status Critical Current

Links

JP18398587U 1987-12-01 1987-12-01 Pending JPH0187531U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18398587U JPH0187531U (US07943777-20110517-C00090.png) 1987-12-01 1987-12-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18398587U JPH0187531U (US07943777-20110517-C00090.png) 1987-12-01 1987-12-01

Publications (1)

Publication Number Publication Date
JPH0187531U true JPH0187531U (US07943777-20110517-C00090.png) 1989-06-09

Family

ID=31475380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18398587U Pending JPH0187531U (US07943777-20110517-C00090.png) 1987-12-01 1987-12-01

Country Status (1)

Country Link
JP (1) JPH0187531U (US07943777-20110517-C00090.png)

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