JPH0187304U - - Google Patents

Info

Publication number
JPH0187304U
JPH0187304U JP18416787U JP18416787U JPH0187304U JP H0187304 U JPH0187304 U JP H0187304U JP 18416787 U JP18416787 U JP 18416787U JP 18416787 U JP18416787 U JP 18416787U JP H0187304 U JPH0187304 U JP H0187304U
Authority
JP
Japan
Prior art keywords
accumulator
vacuum
air
compressed air
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18416787U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18416787U priority Critical patent/JPH0187304U/ja
Publication of JPH0187304U publication Critical patent/JPH0187304U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例の真空用エアシリンダ
の半断面図である。 1……シリンダ本体、2……シリンダロツド、
3……アキユムレータ、4……スプリング、5…
…ピストンシールパツキン、6……圧縮空気供給
口、7……アキユムレータ圧縮エア排出口、8…
…Oリング、9……シリンダロツドシールリング
、10……シールパツキン。
FIG. 1 is a half-sectional view of a vacuum air cylinder according to an embodiment of the present invention. 1...Cylinder body, 2...Cylinder rod,
3...Accumulator, 4...Spring, 5...
...Piston seal gasket, 6...Compressed air supply port, 7...Accumulator compressed air discharge port, 8...
...O-ring, 9...Cylinder rod seal ring, 10...Seal packing.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 圧縮エアの漏れと、シリンダ本体内のエアとを
、真空室外へ排出するアキユムレータを備えたこ
とを特徴とする真空用エアシリンダ。
A vacuum air cylinder characterized by being equipped with an accumulator that discharges compressed air leakage and air inside the cylinder body to the outside of the vacuum chamber.
JP18416787U 1987-12-01 1987-12-01 Pending JPH0187304U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18416787U JPH0187304U (en) 1987-12-01 1987-12-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18416787U JPH0187304U (en) 1987-12-01 1987-12-01

Publications (1)

Publication Number Publication Date
JPH0187304U true JPH0187304U (en) 1989-06-09

Family

ID=31475545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18416787U Pending JPH0187304U (en) 1987-12-01 1987-12-01

Country Status (1)

Country Link
JP (1) JPH0187304U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59164407A (en) * 1983-03-09 1984-09-17 Tourishiya:Kk Cylinder device having vacuum chamber
JPS6057004A (en) * 1983-09-05 1985-04-02 Matsushita Electric Ind Co Ltd Reciprocating cylinder for vacuum apparatus
JPS6232203B2 (en) * 1977-12-29 1987-07-13 Sheru Intern Risaachi Maachatsupii Nv

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6232203B2 (en) * 1977-12-29 1987-07-13 Sheru Intern Risaachi Maachatsupii Nv
JPS59164407A (en) * 1983-03-09 1984-09-17 Tourishiya:Kk Cylinder device having vacuum chamber
JPS6057004A (en) * 1983-09-05 1985-04-02 Matsushita Electric Ind Co Ltd Reciprocating cylinder for vacuum apparatus

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