JPH0187304U - - Google Patents
Info
- Publication number
- JPH0187304U JPH0187304U JP18416787U JP18416787U JPH0187304U JP H0187304 U JPH0187304 U JP H0187304U JP 18416787 U JP18416787 U JP 18416787U JP 18416787 U JP18416787 U JP 18416787U JP H0187304 U JPH0187304 U JP H0187304U
- Authority
- JP
- Japan
- Prior art keywords
- accumulator
- vacuum
- air
- compressed air
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012856 packing Methods 0.000 description 1
Description
第1図は本考案の実施例の真空用エアシリンダ
の半断面図である。
1……シリンダ本体、2……シリンダロツド、
3……アキユムレータ、4……スプリング、5…
…ピストンシールパツキン、6……圧縮空気供給
口、7……アキユムレータ圧縮エア排出口、8…
…Oリング、9……シリンダロツドシールリング
、10……シールパツキン。
FIG. 1 is a half-sectional view of a vacuum air cylinder according to an embodiment of the present invention. 1...Cylinder body, 2...Cylinder rod,
3...Accumulator, 4...Spring, 5...
...Piston seal gasket, 6...Compressed air supply port, 7...Accumulator compressed air discharge port, 8...
...O-ring, 9...Cylinder rod seal ring, 10...Seal packing.
Claims (1)
、真空室外へ排出するアキユムレータを備えたこ
とを特徴とする真空用エアシリンダ。 A vacuum air cylinder characterized by being equipped with an accumulator that discharges compressed air leakage and air inside the cylinder body to the outside of the vacuum chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18416787U JPH0187304U (en) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18416787U JPH0187304U (en) | 1987-12-01 | 1987-12-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0187304U true JPH0187304U (en) | 1989-06-09 |
Family
ID=31475545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18416787U Pending JPH0187304U (en) | 1987-12-01 | 1987-12-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0187304U (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59164407A (en) * | 1983-03-09 | 1984-09-17 | Tourishiya:Kk | Cylinder device having vacuum chamber |
JPS6057004A (en) * | 1983-09-05 | 1985-04-02 | Matsushita Electric Ind Co Ltd | Reciprocating cylinder for vacuum apparatus |
JPS6232203B2 (en) * | 1977-12-29 | 1987-07-13 | Sheru Intern Risaachi Maachatsupii Nv |
-
1987
- 1987-12-01 JP JP18416787U patent/JPH0187304U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6232203B2 (en) * | 1977-12-29 | 1987-07-13 | Sheru Intern Risaachi Maachatsupii Nv | |
JPS59164407A (en) * | 1983-03-09 | 1984-09-17 | Tourishiya:Kk | Cylinder device having vacuum chamber |
JPS6057004A (en) * | 1983-09-05 | 1985-04-02 | Matsushita Electric Ind Co Ltd | Reciprocating cylinder for vacuum apparatus |