JPH0187247U - - Google Patents
Info
- Publication number
- JPH0187247U JPH0187247U JP18299387U JP18299387U JPH0187247U JP H0187247 U JPH0187247 U JP H0187247U JP 18299387 U JP18299387 U JP 18299387U JP 18299387 U JP18299387 U JP 18299387U JP H0187247 U JPH0187247 U JP H0187247U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- carrier gas
- controller
- flow rate
- mass flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012159 carrier gas Substances 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Sampling And Sample Adjustment (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299387U JPH0187247U (OSRAM) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299387U JPH0187247U (OSRAM) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187247U true JPH0187247U (OSRAM) | 1989-06-08 |
Family
ID=31474429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18299387U Pending JPH0187247U (OSRAM) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187247U (OSRAM) |
-
1987
- 1987-12-02 JP JP18299387U patent/JPH0187247U/ja active Pending