JPH0187173U - - Google Patents
Info
- Publication number
- JPH0187173U JPH0187173U JP18251587U JP18251587U JPH0187173U JP H0187173 U JPH0187173 U JP H0187173U JP 18251587 U JP18251587 U JP 18251587U JP 18251587 U JP18251587 U JP 18251587U JP H0187173 U JPH0187173 U JP H0187173U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- vapor phase
- opening
- substrates
- chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987182515U JPH0527503Y2 (fr) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987182515U JPH0527503Y2 (fr) | 1987-11-30 | 1987-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0187173U true JPH0187173U (fr) | 1989-06-08 |
| JPH0527503Y2 JPH0527503Y2 (fr) | 1993-07-13 |
Family
ID=31473962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987182515U Expired - Lifetime JPH0527503Y2 (fr) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527503Y2 (fr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4833150A (fr) * | 1971-08-28 | 1973-05-08 | ||
| JPS57200291A (en) * | 1981-06-01 | 1982-12-08 | Fujitsu Ltd | Vapor-phase growing method of compound semiconductor |
-
1987
- 1987-11-30 JP JP1987182515U patent/JPH0527503Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4833150A (fr) * | 1971-08-28 | 1973-05-08 | ||
| JPS57200291A (en) * | 1981-06-01 | 1982-12-08 | Fujitsu Ltd | Vapor-phase growing method of compound semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527503Y2 (fr) | 1993-07-13 |