JPH0187173U - - Google Patents

Info

Publication number
JPH0187173U
JPH0187173U JP18251587U JP18251587U JPH0187173U JP H0187173 U JPH0187173 U JP H0187173U JP 18251587 U JP18251587 U JP 18251587U JP 18251587 U JP18251587 U JP 18251587U JP H0187173 U JPH0187173 U JP H0187173U
Authority
JP
Japan
Prior art keywords
growth
vapor phase
opening
substrates
chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18251587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527503Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987182515U priority Critical patent/JPH0527503Y2/ja
Publication of JPH0187173U publication Critical patent/JPH0187173U/ja
Application granted granted Critical
Publication of JPH0527503Y2 publication Critical patent/JPH0527503Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987182515U 1987-11-30 1987-11-30 Expired - Lifetime JPH0527503Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987182515U JPH0527503Y2 (fr) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987182515U JPH0527503Y2 (fr) 1987-11-30 1987-11-30

Publications (2)

Publication Number Publication Date
JPH0187173U true JPH0187173U (fr) 1989-06-08
JPH0527503Y2 JPH0527503Y2 (fr) 1993-07-13

Family

ID=31473962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987182515U Expired - Lifetime JPH0527503Y2 (fr) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0527503Y2 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833150A (fr) * 1971-08-28 1973-05-08
JPS57200291A (en) * 1981-06-01 1982-12-08 Fujitsu Ltd Vapor-phase growing method of compound semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833150A (fr) * 1971-08-28 1973-05-08
JPS57200291A (en) * 1981-06-01 1982-12-08 Fujitsu Ltd Vapor-phase growing method of compound semiconductor

Also Published As

Publication number Publication date
JPH0527503Y2 (fr) 1993-07-13

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