JPH0187158U - - Google Patents
Info
- Publication number
- JPH0187158U JPH0187158U JP18398787U JP18398787U JPH0187158U JP H0187158 U JPH0187158 U JP H0187158U JP 18398787 U JP18398787 U JP 18398787U JP 18398787 U JP18398787 U JP 18398787U JP H0187158 U JPH0187158 U JP H0187158U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- stopper
- bearing
- wafer holder
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18398787U JPH0187158U (bs) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18398787U JPH0187158U (bs) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187158U true JPH0187158U (bs) | 1989-06-08 |
Family
ID=31699761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18398787U Pending JPH0187158U (bs) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187158U (bs) |
-
1987
- 1987-12-01 JP JP18398787U patent/JPH0187158U/ja active Pending