JPH0187154U - - Google Patents

Info

Publication number

JPH0187154U

JPH0187154U JP18315787U JP18315787U JPH0187154U JP H0187154 U JPH0187154 U JP H0187154U JP 18315787 U JP18315787 U JP 18315787U JP 18315787 U JP18315787 U JP 18315787U JP H0187154 U JPH0187154 U JP H0187154U

Authority

JP

Japan

Prior art keywords

evaporation source

introduction pipe

tip

center

inert gas

Prior art date

1987-12-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 6
• 238000001704 evaporation Methods 0.000 claims description 6
• 238000009792 diffusion process Methods 0.000 claims description 4
• 239000011261 inert gas Substances 0.000 claims description 4
• 238000007740 vapor deposition Methods 0.000 claims 3
• 239000007789 gas Substances 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 230000008021 deposition Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 239000000463 material Substances 0.000 description 1