JPH0186235U - - Google Patents

Info

Publication number

JPH0186235U

JPH0186235U JP18326287U JP18326287U JPH0186235U JP H0186235 U JPH0186235 U JP H0186235U JP 18326287 U JP18326287 U JP 18326287U JP 18326287 U JP18326287 U JP 18326287U JP H0186235 U JPH0186235 U JP H0186235U

Authority

JP

Japan

Prior art keywords

etching

etching depth

mesa groove

shallow

deep

Prior art date

1987-11-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005530 etching Methods 0.000 claims 3
• 230000002093 peripheral effect Effects 0.000 claims 1
• 230000001681 protective effect Effects 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000000034 method Methods 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1