JPH0186230U - - Google Patents

Info

Publication number
JPH0186230U
JPH0186230U JP18140587U JP18140587U JPH0186230U JP H0186230 U JPH0186230 U JP H0186230U JP 18140587 U JP18140587 U JP 18140587U JP 18140587 U JP18140587 U JP 18140587U JP H0186230 U JPH0186230 U JP H0186230U
Authority
JP
Japan
Prior art keywords
wafer boat
tube
cantilever tube
cantilever
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18140587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18140587U priority Critical patent/JPH0186230U/ja
Publication of JPH0186230U publication Critical patent/JPH0186230U/ja
Pending legal-status Critical Current

Links

JP18140587U 1987-11-28 1987-11-28 Pending JPH0186230U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18140587U JPH0186230U (US07943777-20110517-C00090.png) 1987-11-28 1987-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18140587U JPH0186230U (US07943777-20110517-C00090.png) 1987-11-28 1987-11-28

Publications (1)

Publication Number Publication Date
JPH0186230U true JPH0186230U (US07943777-20110517-C00090.png) 1989-06-07

Family

ID=31472889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18140587U Pending JPH0186230U (US07943777-20110517-C00090.png) 1987-11-28 1987-11-28

Country Status (1)

Country Link
JP (1) JPH0186230U (US07943777-20110517-C00090.png)

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