JPH0184436U - - Google Patents

Info

Publication number
JPH0184436U
JPH0184436U JP1987180479U JP18047987U JPH0184436U JP H0184436 U JPH0184436 U JP H0184436U JP 1987180479 U JP1987180479 U JP 1987180479U JP 18047987 U JP18047987 U JP 18047987U JP H0184436 U JPH0184436 U JP H0184436U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
tray
storage plate
frame body
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987180479U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987180479U priority Critical patent/JPH0184436U/ja
Publication of JPH0184436U publication Critical patent/JPH0184436U/ja
Pending legal-status Critical Current

Links

JP1987180479U 1987-11-26 1987-11-26 Pending JPH0184436U (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987180479U JPH0184436U (US20020095090A1-20020718-M00002.png) 1987-11-26 1987-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987180479U JPH0184436U (US20020095090A1-20020718-M00002.png) 1987-11-26 1987-11-26

Publications (1)

Publication Number Publication Date
JPH0184436U true JPH0184436U (US20020095090A1-20020718-M00002.png) 1989-06-05

Family

ID=31471997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987180479U Pending JPH0184436U (US20020095090A1-20020718-M00002.png) 1987-11-26 1987-11-26

Country Status (1)

Country Link
JP (1) JPH0184436U (US20020095090A1-20020718-M00002.png)

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