JPH0184426U - - Google Patents
Info
- Publication number
- JPH0184426U JPH0184426U JP1987181326U JP18132687U JPH0184426U JP H0184426 U JPH0184426 U JP H0184426U JP 1987181326 U JP1987181326 U JP 1987181326U JP 18132687 U JP18132687 U JP 18132687U JP H0184426 U JPH0184426 U JP H0184426U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- support bars
- holding
- grooves
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181326U JPH0184426U (ru) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181326U JPH0184426U (ru) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184426U true JPH0184426U (ru) | 1989-06-05 |
Family
ID=31472811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181326U Pending JPH0184426U (ru) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184426U (ru) |
-
1987
- 1987-11-27 JP JP1987181326U patent/JPH0184426U/ja active Pending