JPH0184053U - - Google Patents

Info

Publication number

JPH0184053U

JPH0184053U JP1987179150U JP17915087U JPH0184053U JP H0184053 U JPH0184053 U JP H0184053U JP 1987179150 U JP1987179150 U JP 1987179150U JP 17915087 U JP17915087 U JP 17915087U JP H0184053 U JPH0184053 U JP H0184053U

Authority

JP

Japan

Prior art keywords

oxygen concentration

view

green sheet

concentration detecting

flat part

Prior art date

1987-11-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000919 ceramic Substances 0.000 claims description 9
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
• 229910052760 oxygen Inorganic materials 0.000 claims description 5
• 239000001301 oxygen Substances 0.000 claims description 5
• 238000001514 detection method Methods 0.000 claims description 4
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000011241 protective layer Substances 0.000 description 1

Cited By (1)