JPH0184022U - - Google Patents
Info
- Publication number
- JPH0184022U JPH0184022U JP1987178813U JP17881387U JPH0184022U JP H0184022 U JPH0184022 U JP H0184022U JP 1987178813 U JP1987178813 U JP 1987178813U JP 17881387 U JP17881387 U JP 17881387U JP H0184022 U JPH0184022 U JP H0184022U
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- heater
- fastening fittings
- flow controller
- tightening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 description 2
Landscapes
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17881387U JPH0623943Y2 (ja) | 1987-11-26 | 1987-11-26 | マスフローコントローラー用ヒーター |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17881387U JPH0623943Y2 (ja) | 1987-11-26 | 1987-11-26 | マスフローコントローラー用ヒーター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184022U true JPH0184022U (zh) | 1989-06-05 |
| JPH0623943Y2 JPH0623943Y2 (ja) | 1994-06-22 |
Family
ID=31470412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17881387U Expired - Lifetime JPH0623943Y2 (ja) | 1987-11-26 | 1987-11-26 | マスフローコントローラー用ヒーター |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623943Y2 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004066048A1 (ja) * | 2003-01-17 | 2004-08-05 | Fujikin Incorporated | クラスター化する流体の流量制御方法及びこれに用いるクラスター化する流体用の流量制御装置 |
| WO2015141437A1 (ja) * | 2014-03-20 | 2015-09-24 | 日立金属株式会社 | 熱式質量流量計及びこれを用いた質量流量制御装置 |
-
1987
- 1987-11-26 JP JP17881387U patent/JPH0623943Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004066048A1 (ja) * | 2003-01-17 | 2004-08-05 | Fujikin Incorporated | クラスター化する流体の流量制御方法及びこれに用いるクラスター化する流体用の流量制御装置 |
| WO2015141437A1 (ja) * | 2014-03-20 | 2015-09-24 | 日立金属株式会社 | 熱式質量流量計及びこれを用いた質量流量制御装置 |
| JPWO2015141437A1 (ja) * | 2014-03-20 | 2017-04-06 | 日立金属株式会社 | 熱式質量流量計及びこれを用いた質量流量制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623943Y2 (ja) | 1994-06-22 |