JPH0183434U - - Google Patents
Info
- Publication number
- JPH0183434U JPH0183434U JP1987171140U JP17114087U JPH0183434U JP H0183434 U JPH0183434 U JP H0183434U JP 1987171140 U JP1987171140 U JP 1987171140U JP 17114087 U JP17114087 U JP 17114087U JP H0183434 U JPH0183434 U JP H0183434U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- liquid raw
- supply pipe
- gas supply
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005587 bubbling Effects 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 4
- 239000002994 raw material Substances 0.000 claims 3
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171140U JPH0183434U (me) | 1987-11-09 | 1987-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171140U JPH0183434U (me) | 1987-11-09 | 1987-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183434U true JPH0183434U (me) | 1989-06-02 |
Family
ID=31462706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171140U Pending JPH0183434U (me) | 1987-11-09 | 1987-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183434U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516304A (ja) * | 1999-12-11 | 2003-05-13 | エピケム リミテッド | 前駆物質を複数のエピタキシャル・リアクター部に供給するための方法および装置 |
-
1987
- 1987-11-09 JP JP1987171140U patent/JPH0183434U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516304A (ja) * | 1999-12-11 | 2003-05-13 | エピケム リミテッド | 前駆物質を複数のエピタキシャル・リアクター部に供給するための方法および装置 |
| JP2011137235A (ja) * | 1999-12-11 | 2011-07-14 | Sigma Aldrich Co | 有機金属前駆物質を複数のエピタキシャル・リアクター部にバルク供給するための方法 |