JPH0183423U - - Google Patents

Info

Publication number
JPH0183423U
JPH0183423U JP1987175660U JP17566087U JPH0183423U JP H0183423 U JPH0183423 U JP H0183423U JP 1987175660 U JP1987175660 U JP 1987175660U JP 17566087 U JP17566087 U JP 17566087U JP H0183423 U JPH0183423 U JP H0183423U
Authority
JP
Japan
Prior art keywords
container
high purity
gas
connecting parts
packed layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987175660U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987175660U priority Critical patent/JPH0183423U/ja
Publication of JPH0183423U publication Critical patent/JPH0183423U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP1987175660U 1987-11-17 1987-11-17 Pending JPH0183423U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987175660U JPH0183423U (enrdf_load_stackoverflow) 1987-11-17 1987-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987175660U JPH0183423U (enrdf_load_stackoverflow) 1987-11-17 1987-11-17

Publications (1)

Publication Number Publication Date
JPH0183423U true JPH0183423U (enrdf_load_stackoverflow) 1989-06-02

Family

ID=31467445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987175660U Pending JPH0183423U (enrdf_load_stackoverflow) 1987-11-17 1987-11-17

Country Status (1)

Country Link
JP (1) JPH0183423U (enrdf_load_stackoverflow)

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