JPH0183255U - - Google Patents

Info

Publication number

JPH0183255U

JPH0183255U JP1987180292U JP18029287U JPH0183255U JP H0183255 U JPH0183255 U JP H0183255U JP 1987180292 U JP1987180292 U JP 1987180292U JP 18029287 U JP18029287 U JP 18029287U JP H0183255 U JPH0183255 U JP H0183255U

Authority

JP

Japan

Prior art keywords

electron beam

beam detection

sample

detection element

move

Prior art date

1987-11-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010894 electron beam technology Methods 0.000 claims description 5
• 238000001514 detection method Methods 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 3
• 230000005540 biological transmission Effects 0.000 description 1
• 238000005211 surface analysis Methods 0.000 description 1