JPH0182500U - - Google Patents

Info

Publication number
JPH0182500U
JPH0182500U JP1987176403U JP17640387U JPH0182500U JP H0182500 U JPH0182500 U JP H0182500U JP 1987176403 U JP1987176403 U JP 1987176403U JP 17640387 U JP17640387 U JP 17640387U JP H0182500 U JPH0182500 U JP H0182500U
Authority
JP
Japan
Prior art keywords
crucible
electromagnets
coil
heated
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987176403U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987176403U priority Critical patent/JPH0182500U/ja
Publication of JPH0182500U publication Critical patent/JPH0182500U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Furnace Details (AREA)
JP1987176403U 1987-11-20 1987-11-20 Pending JPH0182500U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987176403U JPH0182500U (ko) 1987-11-20 1987-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987176403U JPH0182500U (ko) 1987-11-20 1987-11-20

Publications (1)

Publication Number Publication Date
JPH0182500U true JPH0182500U (ko) 1989-06-01

Family

ID=31468138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987176403U Pending JPH0182500U (ko) 1987-11-20 1987-11-20

Country Status (1)

Country Link
JP (1) JPH0182500U (ko)

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