JPH0181653U - - Google Patents
Info
- Publication number
- JPH0181653U JPH0181653U JP17869187U JP17869187U JPH0181653U JP H0181653 U JPH0181653 U JP H0181653U JP 17869187 U JP17869187 U JP 17869187U JP 17869187 U JP17869187 U JP 17869187U JP H0181653 U JPH0181653 U JP H0181653U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- transmission range
- light
- pattern member
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Electronic Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17869187U JPH0181653U (hu) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17869187U JPH0181653U (hu) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0181653U true JPH0181653U (hu) | 1989-05-31 |
Family
ID=31470299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17869187U Pending JPH0181653U (hu) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0181653U (hu) |
-
1987
- 1987-11-24 JP JP17869187U patent/JPH0181653U/ja active Pending
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