JPH0181236U - - Google Patents
Info
- Publication number
- JPH0181236U JPH0181236U JP1987177263U JP17726387U JPH0181236U JP H0181236 U JPH0181236 U JP H0181236U JP 1987177263 U JP1987177263 U JP 1987177263U JP 17726387 U JP17726387 U JP 17726387U JP H0181236 U JPH0181236 U JP H0181236U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- steel strip
- drum
- table assembly
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 11
- 239000010959 steel Substances 0.000 claims description 11
- 238000004804 winding Methods 0.000 claims 2
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
Description
第１図は本考案によるＸ−Ｙステージの頂面図
である。第２図は第１図のＸ−Ｙステージの側面
図である。第３図は第１図のＸ−Ｙステージの別
の方向の側面図である。第４図は第１図のＸ−Ｙ
ステージの底面図である。第５図はＸ軸駆動組立
体の鋼帯に張力を付与する機構を説明する図であ
る。第６図は第５図の機構の側面図である。
図面において、１０…Ｘ軸テーブル、１２…Ｙ
軸テーブル、１４…ガイドレール、１６…スライ
ド、１８…ガイドレール、２０…スライド、２２
…Ｘ軸駆動組立体、２４…Ｘ軸駆動モータ、２６
…ドラム、２８…鋼帯、３２…Ｙ軸駆動組立体、
３４…Ｙ軸駆動ドラム、３６…ドラム、４０…張
力付与手段。
FIG. 1 is a top view of the XY stage according to the present invention. FIG. 2 is a side view of the XY stage of FIG. 1. FIG. 3 is a side view of the XY stage of FIG. 1 in another direction. Figure 4 is X-Y in Figure 1.
FIG. 3 is a bottom view of the stage. FIG. 5 is a diagram illustrating a mechanism for applying tension to the steel strip of the X-axis drive assembly. FIG. 6 is a side view of the mechanism of FIG. 5. In the drawing, 10...X-axis table, 12...Y
Axis table, 14... Guide rail, 16... Slide, 18... Guide rail, 20... Slide, 22
...X-axis drive assembly, 24...X-axis drive motor, 26
... drum, 28 ... steel strip, 32 ... Y-axis drive assembly,
34... Y-axis drive drum, 36... Drum, 40... Tension applying means.
Claims (1)
のテーブルを包含するＸ−Ｙステージにおいて、
各テーブルに２本の鋼帯のそれぞれが間隔を置い
て固定してあり、それぞれの鋼帯の別の部分が対
応するモータ駆動のドラムに固定してあり、これ
らの鋼帯の一方がドラムに巻き付くときに他方の
鋼帯が同じドラムから繰り出されるようになつて
いる一対のテーブル組立体を包含し、一方のテー
ブル組立体の鋼帯の巻き取り、繰り出し方向が他
方のテーブル組立体の鋼帯の巻き取り、繰り出し
方向に直交しており、一方のテーブル組立体が他
方のテーブル組立体上に設置してあることを特徴
とするＸ−Ｙステージ。 (2) 実用新案登録請求の範囲第(1)項記載のＸ−
Ｙステージにおいて、各テーブル組立体のモータ
駆動ドラムの回転軸線が対応するテーブルの平面
に対して直角となつていることを特徴とするＸ−
Ｙステージ。 (3) 実用新案登録請求の範囲第(1)項記載のＸ−
Ｙステージにおいて、各鋼帯が無端鋼帯であるこ
とを特徴とするＸ−Ｙステージ。 (4) 実用新案登録請求の範囲第(1)項記載のＸ−
Ｙステージにおいて、各鋼帯が一端をテーブルに
固定され、他端をドラムに固定された或る長さの
一本の鋼帯であることを特徴とするＸ−Ｙステー
ジ。 (5) 実用新案登録請求の範囲第(4)項記載のＸ−
Ｙステージにおいて、各鋼帯の一端が張力付与手
段を介してテーブルまたはドラムに連結してある
ことを特徴とするＸ−Ｙステージ。[Claims for Utility Model Registration] (1) In an X-Y stage that includes two tables capable of linear movement in mutually orthogonal directions,
Two steel strips are each fixed at a distance to each table, a separate portion of each steel strip is fixed to a corresponding motor-driven drum, and one of these strips is fixed to the drum. It includes a pair of table assemblies such that the steel strip of the other table assembly is unwound from the same drum when the other table assembly is wound, and the winding and unwinding direction of the steel strip of one table assembly is the same as that of the other table assembly. An X-Y stage which is perpendicular to the winding and unwinding direction of the band and is characterized in that one table assembly is installed on the other table assembly. (2) X- stated in paragraph (1) of claims for utility model registration
In the Y-stage, the axis of rotation of the motor-driven drum of each table assembly is perpendicular to the plane of the corresponding table.
Y stage. (3) X- stated in paragraph (1) of claims for utility model registration
An X-Y stage characterized in that in the Y stage, each steel strip is an endless steel strip. (4) X- stated in paragraph (1) of claims for utility model registration
An X-Y stage in which each steel strip is a length of steel strip fixed at one end to a table and the other end fixed to a drum. (5) X- stated in paragraph (4) of claims for utility model registration
An X-Y stage characterized in that, in the Y stage, one end of each steel strip is connected to a table or a drum via tensioning means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17726387U JPH0641787Y2 (en) | 1987-11-20 | 1987-11-20 | XY stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17726387U JPH0641787Y2 (en) | 1987-11-20 | 1987-11-20 | XY stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0181236U true JPH0181236U (en) | 1989-05-31 |
| JPH0641787Y2 JPH0641787Y2 (en) | 1994-11-02 |
Family
ID=31468934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17726387U Expired - Lifetime JPH0641787Y2 (en) | 1987-11-20 | 1987-11-20 | XY stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641787Y2 (en) |
-
1987
- 1987-11-20 JP JP17726387U patent/JPH0641787Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641787Y2 (en) | 1994-11-02 |
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