JPH0180933U - - Google Patents

Info

Publication number
JPH0180933U
JPH0180933U JP1987177941U JP17794187U JPH0180933U JP H0180933 U JPH0180933 U JP H0180933U JP 1987177941 U JP1987177941 U JP 1987177941U JP 17794187 U JP17794187 U JP 17794187U JP H0180933 U JPH0180933 U JP H0180933U
Authority
JP
Japan
Prior art keywords
loading
wafers
elevator mechanism
transfer device
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987177941U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987177941U priority Critical patent/JPH0180933U/ja
Publication of JPH0180933U publication Critical patent/JPH0180933U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP1987177941U 1987-11-20 1987-11-20 Pending JPH0180933U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987177941U JPH0180933U (US07943777-20110517-C00090.png) 1987-11-20 1987-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987177941U JPH0180933U (US07943777-20110517-C00090.png) 1987-11-20 1987-11-20

Publications (1)

Publication Number Publication Date
JPH0180933U true JPH0180933U (US07943777-20110517-C00090.png) 1989-05-30

Family

ID=31469586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987177941U Pending JPH0180933U (US07943777-20110517-C00090.png) 1987-11-20 1987-11-20

Country Status (1)

Country Link
JP (1) JPH0180933U (US07943777-20110517-C00090.png)

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