JPH0180927U - - Google Patents
Info
- Publication number
- JPH0180927U JPH0180927U JP1987176633U JP17663387U JPH0180927U JP H0180927 U JPH0180927 U JP H0180927U JP 1987176633 U JP1987176633 U JP 1987176633U JP 17663387 U JP17663387 U JP 17663387U JP H0180927 U JPH0180927 U JP H0180927U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- retention means
- peripheral surface
- reaction tube
- vertical semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000014759 maintenance of location Effects 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims 1
- 239000002244 precipitate Substances 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176633U JPH0180927U (un) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176633U JPH0180927U (un) | 1987-11-19 | 1987-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180927U true JPH0180927U (un) | 1989-05-30 |
Family
ID=31468356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176633U Pending JPH0180927U (un) | 1987-11-19 | 1987-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180927U (un) |
-
1987
- 1987-11-19 JP JP1987176633U patent/JPH0180927U/ja active Pending