JPH0180682U - - Google Patents
Info
- Publication number
- JPH0180682U JPH0180682U JP1987176124U JP17612487U JPH0180682U JP H0180682 U JPH0180682 U JP H0180682U JP 1987176124 U JP1987176124 U JP 1987176124U JP 17612487 U JP17612487 U JP 17612487U JP H0180682 U JPH0180682 U JP H0180682U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- pump series
- vacuum
- status
- operating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007704 transition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612487U JPH0240312Y2 (cs) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612487U JPH0240312Y2 (cs) | 1987-11-18 | 1987-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180682U true JPH0180682U (cs) | 1989-05-30 |
| JPH0240312Y2 JPH0240312Y2 (cs) | 1990-10-26 |
Family
ID=31467883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17612487U Expired JPH0240312Y2 (cs) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240312Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012074099A1 (ja) * | 2010-12-03 | 2012-06-07 | 東京エレクトロン株式会社 | 排気装置の制御方法及び排気装置の制御装置 |
-
1987
- 1987-11-18 JP JP17612487U patent/JPH0240312Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012074099A1 (ja) * | 2010-12-03 | 2012-06-07 | 東京エレクトロン株式会社 | 排気装置の制御方法及び排気装置の制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0240312Y2 (cs) | 1990-10-26 |