JPH0179839U - - Google Patents
Info
- Publication number
- JPH0179839U JPH0179839U JP1987174432U JP17443287U JPH0179839U JP H0179839 U JPH0179839 U JP H0179839U JP 1987174432 U JP1987174432 U JP 1987174432U JP 17443287 U JP17443287 U JP 17443287U JP H0179839 U JPH0179839 U JP H0179839U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- carrier
- manner
- alignment plate
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987174432U JPH0179839U (el) | 1987-11-17 | 1987-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987174432U JPH0179839U (el) | 1987-11-17 | 1987-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0179839U true JPH0179839U (el) | 1989-05-29 |
Family
ID=31466288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987174432U Pending JPH0179839U (el) | 1987-11-17 | 1987-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0179839U (el) |
-
1987
- 1987-11-17 JP JP1987174432U patent/JPH0179839U/ja active Pending