JPH0179829U - - Google Patents

Info

Publication number
JPH0179829U
JPH0179829U JP1987175110U JP17511087U JPH0179829U JP H0179829 U JPH0179829 U JP H0179829U JP 1987175110 U JP1987175110 U JP 1987175110U JP 17511087 U JP17511087 U JP 17511087U JP H0179829 U JPH0179829 U JP H0179829U
Authority
JP
Japan
Prior art keywords
wafer
epi
wafer chuck
air cylinder
spike
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987175110U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987175110U priority Critical patent/JPH0179829U/ja
Publication of JPH0179829U publication Critical patent/JPH0179829U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP1987175110U 1987-11-18 1987-11-18 Pending JPH0179829U (US20050065096A1-20050324-C00034.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987175110U JPH0179829U (US20050065096A1-20050324-C00034.png) 1987-11-18 1987-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987175110U JPH0179829U (US20050065096A1-20050324-C00034.png) 1987-11-18 1987-11-18

Publications (1)

Publication Number Publication Date
JPH0179829U true JPH0179829U (US20050065096A1-20050324-C00034.png) 1989-05-29

Family

ID=31466924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987175110U Pending JPH0179829U (US20050065096A1-20050324-C00034.png) 1987-11-18 1987-11-18

Country Status (1)

Country Link
JP (1) JPH0179829U (US20050065096A1-20050324-C00034.png)

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