JPH0178928U - - Google Patents
Info
- Publication number
- JPH0178928U JPH0178928U JP1987174898U JP17489887U JPH0178928U JP H0178928 U JPH0178928 U JP H0178928U JP 1987174898 U JP1987174898 U JP 1987174898U JP 17489887 U JP17489887 U JP 17489887U JP H0178928 U JPH0178928 U JP H0178928U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- chip
- metal thin
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987174898U JPH0178928U (US20110009641A1-20110113-C00185.png) | 1987-11-16 | 1987-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987174898U JPH0178928U (US20110009641A1-20110113-C00185.png) | 1987-11-16 | 1987-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0178928U true JPH0178928U (US20110009641A1-20110113-C00185.png) | 1989-05-26 |
Family
ID=31466728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987174898U Pending JPH0178928U (US20110009641A1-20110113-C00185.png) | 1987-11-16 | 1987-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0178928U (US20110009641A1-20110113-C00185.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9463436B2 (en) | 2011-05-24 | 2016-10-11 | Shin-Etsu Chemical Co., Ltd. | Method for manufacturing microparticulate anatase or rutile titanium oxide dispersion and component having photocatalytic thin film on surface |
-
1987
- 1987-11-16 JP JP1987174898U patent/JPH0178928U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9463436B2 (en) | 2011-05-24 | 2016-10-11 | Shin-Etsu Chemical Co., Ltd. | Method for manufacturing microparticulate anatase or rutile titanium oxide dispersion and component having photocatalytic thin film on surface |
