JPH0178023U - - Google Patents

Info

Publication number
JPH0178023U
JPH0178023U JP1987172645U JP17264587U JPH0178023U JP H0178023 U JPH0178023 U JP H0178023U JP 1987172645 U JP1987172645 U JP 1987172645U JP 17264587 U JP17264587 U JP 17264587U JP H0178023 U JPH0178023 U JP H0178023U
Authority
JP
Japan
Prior art keywords
sample
electron beam
sample holder
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987172645U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172645U priority Critical patent/JPH0178023U/ja
Publication of JPH0178023U publication Critical patent/JPH0178023U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1987172645U 1987-11-13 1987-11-13 Pending JPH0178023U (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172645U JPH0178023U (US07968547-20110628-C00004.png) 1987-11-13 1987-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172645U JPH0178023U (US07968547-20110628-C00004.png) 1987-11-13 1987-11-13

Publications (1)

Publication Number Publication Date
JPH0178023U true JPH0178023U (US07968547-20110628-C00004.png) 1989-05-25

Family

ID=31464603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172645U Pending JPH0178023U (US07968547-20110628-C00004.png) 1987-11-13 1987-11-13

Country Status (1)

Country Link
JP (1) JPH0178023U (US07968547-20110628-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05198663A (ja) * 1992-01-21 1993-08-06 Hitachi Ltd 試料搬送ホルダ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05198663A (ja) * 1992-01-21 1993-08-06 Hitachi Ltd 試料搬送ホルダ

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