JPH0177807U - - Google Patents

Info

Publication number
JPH0177807U
JPH0177807U JP1987170670U JP17067087U JPH0177807U JP H0177807 U JPH0177807 U JP H0177807U JP 1987170670 U JP1987170670 U JP 1987170670U JP 17067087 U JP17067087 U JP 17067087U JP H0177807 U JPH0177807 U JP H0177807U
Authority
JP
Japan
Prior art keywords
gas recovery
pipe
coolant
recovery chamber
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987170670U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141450Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17067087U priority Critical patent/JPH0141450Y2/ja
Publication of JPH0177807U publication Critical patent/JPH0177807U/ja
Application granted granted Critical
Publication of JPH0141450Y2 publication Critical patent/JPH0141450Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP17067087U 1987-11-10 1987-11-10 Expired JPH0141450Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17067087U JPH0141450Y2 (enrdf_load_stackoverflow) 1987-11-10 1987-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17067087U JPH0141450Y2 (enrdf_load_stackoverflow) 1987-11-10 1987-11-10

Publications (2)

Publication Number Publication Date
JPH0177807U true JPH0177807U (enrdf_load_stackoverflow) 1989-05-25
JPH0141450Y2 JPH0141450Y2 (enrdf_load_stackoverflow) 1989-12-07

Family

ID=31461815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17067087U Expired JPH0141450Y2 (enrdf_load_stackoverflow) 1987-11-10 1987-11-10

Country Status (1)

Country Link
JP (1) JPH0141450Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0141450Y2 (enrdf_load_stackoverflow) 1989-12-07

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