JPH0177807U - - Google Patents

Info

Publication number
JPH0177807U
JPH0177807U JP1987170670U JP17067087U JPH0177807U JP H0177807 U JPH0177807 U JP H0177807U JP 1987170670 U JP1987170670 U JP 1987170670U JP 17067087 U JP17067087 U JP 17067087U JP H0177807 U JPH0177807 U JP H0177807U
Authority
JP
Japan
Prior art keywords
gas recovery
pipe
coolant
recovery chamber
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987170670U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141450Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17067087U priority Critical patent/JPH0141450Y2/ja
Publication of JPH0177807U publication Critical patent/JPH0177807U/ja
Application granted granted Critical
Publication of JPH0141450Y2 publication Critical patent/JPH0141450Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP17067087U 1987-11-10 1987-11-10 Expired JPH0141450Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17067087U JPH0141450Y2 (cs) 1987-11-10 1987-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17067087U JPH0141450Y2 (cs) 1987-11-10 1987-11-10

Publications (2)

Publication Number Publication Date
JPH0177807U true JPH0177807U (cs) 1989-05-25
JPH0141450Y2 JPH0141450Y2 (cs) 1989-12-07

Family

ID=31461815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17067087U Expired JPH0141450Y2 (cs) 1987-11-10 1987-11-10

Country Status (1)

Country Link
JP (1) JPH0141450Y2 (cs)

Also Published As

Publication number Publication date
JPH0141450Y2 (cs) 1989-12-07

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